Semiconductor manufacturing is a central pillar of the modern technology industry, underpinning technologies ranging from smartphones to high-performance computing. However, as the demand for advanced processes increases, so do the sustainability challenges facing the industry. In particular, environmental and health issues related to PFAS (per- and polyfluoroalkyl substances) have become an important issue that the global semiconductor industry must address.
Applications of PFAS in semiconductor manufacturing
PFAS are a class of chemically stable compounds that are widely used in many processes in semiconductor manufacturing due to their strong heat resistance, chemical inertness, and surface activity. They play a key role in photoresists, etchants, cleaners, and other high-precision materials, especially in cutting-edge processes such as 7nm, 5nm, and in the future, 3nm, PFAS help manufacturers achieve greater production accuracy and reliability.
The lithography process relies on PFAS materials to create high-resolution patterns, which ensure precise control of chemical reactions during etching, and remove fine particles and contaminants during the cleaning phase. Due to their chemical properties and properties, PFAS are irreplaceable in improving wafer yield and ensuring product consistency. However, it is this high stability that makes PFAS difficult to degrade in the environment, posing a huge ecological and health threat.
Environmental and health challenges of PFAS
PFAS are known as "forever chemicals" and their chemical bonds are extremely difficult to break down naturally. Once in the environment, they can spread widely through wastewater discharge, airborne transmission, etc., and eventually infiltrate into soil, water bodies and even the food chain. Studies have shown that PFAS residues can lead to water contamination and accumulation in plants and animals, as well as adverse health effects from prolonged exposure.
In terms of health, PFAS have been linked to a variety of diseases such as cancer, immune system suppression, endocrine disorders, and reproductive problems. Especially in semiconductor manufacturing, poor management of factory wastewater can lead to PFAS entering groundwater systems, which can affect the water quality and health of nearby communities. This issue has attracted widespread attention around the world, prompting governments to more stringent controls on the use and emissions of PFAS.
Figure: PFAS sustainability challenges and solutions in semiconductor manufacturing
The semiconductor industry under global regulatory pressure
As the environmental and health risks posed by PFAS become more apparent, countries around the world have gradually introduced corresponding laws and regulations. The European Union classifies PFAS as a controlled substance through its chemicals regulation "REACH", and several states in the United States have set stricter limits on the emission and use of PFAS. These measures put pressure on semiconductor manufacturers to comply with the pressure, forcing them to seek environmentally friendly alternatives and reduce their reliance on PFAS.
In addition to legal pressure, public attention to environmental protection and corporate social responsibility is also increasing. Companies are not only facing government regulation, but also public pressure to be more transparent about environmental practices and reduce the use of hazardous substances. Therefore, how to reduce the use of PFAS while maintaining production efficiency has become a common issue in the semiconductor industry.
Technological innovation and the exploration of environmentally friendly alternatives
Despite the unique technological advantages of PFAS for semiconductor manufacturing, reducing its use is not unachievable. A number of research institutes and companies are developing new materials and processes that can gradually replace PFAS. For example, some materials scientists are exploring biodegradable or low-environmental risk based chemicals that they hope will provide similar performance to PFAS but without long-term environmental pollution. In addition, new wastewater treatment technologies are constantly evolving to more efficiently remove PFAS residues from processes and prevent them from entering the natural environment.
To accelerate this process, collaboration between government, academia, and semiconductor companies is essential. Through joint R&D and resource sharing, the industry can more quickly find innovative ways to balance environmental protection and efficient production. For example, companies such as ROHM and Infineon are investing in the development of green technologies and low-power chips, which can not only reduce harmful emissions from the manufacturing process, but also improve the energy efficiency of end equipment and further promote the sustainable development of the entire electronics industry.
